董渊 教授
邮箱：dongyuan@shu.edu.cn
上海大学微电子学院
导师介绍：
新加坡国立大学博士、博士后，曾任新加坡微电子研究院（IME，A*Star）研究员/科学家、项目负责人。专注于硅基光电子芯片、先进微纳制造、超低温光电互连等领域的研究，拥有多年的8吋/12吋晶圆工艺经验。曾领导和参与了多个海外企业、政府研究项目。在SCI期刊和国际会议上发表论文130余篇。其中，在半导体器件、光通信顶级会议（IEDM、VLSI Symp.，OFC等）发表第一作者/通讯作者论文9篇，并多次在国际顶会上做口头报告。授权美国专利1件，申请/授权中国专利数十件。
所指导的研究生毕业后就职于华为、台积电（TSMC）、中微半导体、积塔半导体等业内知名企业。所指导的毕业生在新加坡南洋理工大学、香港科技大学、华中科技大学、复旦大学、中国科学院、上海大学等机构继续深造。
招收微电子、光电子、应用物理、光学工程、材料学、机械自动化等相关专业背景的硕士、博士。招聘集成光电器件、半导体工艺等相关领域的博士后研究人员。
研究方向：
1. 应用于光通信、光传感、光计算的硅基光电子芯片设计与制造工艺：
l （光探测）锗硅光电探测器(p-i-n、APD等)芯片
l （光调制）硅基集成电-光、声-光调制器芯片
2. 应用于量子计算、量子传感的超低温光电子芯片、跨温区光电互连系统、短波长集成光子芯片等。
3. 光子集成电路（PIC）晶圆级制造技术
教育背景：
2016年博士毕业于新加坡国立大学，电子工程专业
2012年本科毕业于华中科技大学，光信息科学与技术专业
工作经历：
2021年3月-至今上海大学，教授、博士生导师
2017年10月-2021年3月新加坡微电子研究院，科学家、项目负责人
2016年9月-2017年10月新加坡国立大学，博士后
科研成果及获奖情况：
l在IEEE Journal of Lightwave Technology、IEEE Electron Device Letters、IEEE Transactions on Electron Devices、Photonics Research、Optics Express、Optics Letters等SCI期刊，和IEDM、VLSI Symp.、OFC、CLEO等学术会议上发表论文130余篇。授权美国专利1件，申请/授权中国专利数十件。
l上海大学“伟长学者”
l获得2023年度“上海大学本科毕业论文优秀指导教师奖”
l所指导的多名硕士/博士生获得国家奖学金
l教育教学奖项若干。
近5年代表性论文：
[1] W. Yan, R. Ma, B. Yang, Y. Li, F. Cao, Y. Qiu, X. Zhao, S. Zheng, Q. Zhong, Y. Dong*, and T. Hu*, "Compact high-Q silicon nitride Euler microrings operating from room to cryogenic temperatures, " accepted by Journal of Lightwave Technology, 2026.
[2] R. Ma, M. Zhao, Y. Shi, W. Yan, Y. Qiu, X. Zhao, S. Zheng, Q. Zhong, Y. Dong*, T. Hu, "Wafer-level growth of p4mm-textured BaTiO₃ films on SiO₂-on-Si substrates by RF magnetron sputtering," accepted by Applied Physics Letters, 2026.
[3] C. Shao, J. Liu, T. Zheng, F. He, F. Cao, Y. Qiu, X. Zhao, S. Zheng, W. Wang, Q. Zhong, Y. Dong*, and T. Hu, "High-speed and low-static-power germanium-on-silicon photodetectors at cryogenic temperatures, " IEEE Electron Device Letters, vol. 47, no. 7, Jul. 2026.
[4] M. Zhao, R. Ma, F. Cao, Y. Qiu, X. Zhao, S. Zheng, Q. Zhong, Y. Dong* and T. Hu, "Surface morphology evolution in argon ion-beam polishing of barium titanate thin films," Applied Physics Letters, vol. 128, p. 181601, 2026.
[5] R. Ma, W. Yan, M. Zhao, X. Liu, Y. Pu, Y. Qiu, X. Zhao, S. Zheng, Q. Zhong, Y. Dong*, and T. Hu, "Distinct nucleation and growth kinetics of BaTiO₃ on Ge (001) by RF magnetron sputtering," Applied Physics Letters, vol. 127, no. 1, p. 011908, 2025.
[6] X. Liu, R. Chen, Y. Lu, C. Zhu, Y. Qiu, X. Zhao, S. Zheng, Q. Zhong, B. Cui, Y. Dong*, and T. Hu, "Optical performances of near-infrared metalenses with process-induced defects," Chinese Optics Letters, vol. 23, no. 6, p. 063602, 2025.
[7] M. Zhao, Y. Liu, R. Ma, Y. Qiu, X. Zhao, S. Zheng, Q. Zhong, Y. Dong*, and T. Hu, "Ion beam etching of barium titanate for integrated photonics," Journal of Vacuum Science & Technology A, vol. 43, no. 3, p. 032601, 2025.
[8] X. Liu, J. Liu, W. Yan, X. Zhao, S. Zheng, Y. Qiu, Q. Zhong, W. Wang, Y. Dong*, and T. Hu, "Temperature-dependent characteristics of germanium on silicon avalanche photodiodes," IEEE Sensors Journal, vol. 25, no. 22, pp. 41227-41227, 2025.
[9] Z. Xiong, X. Zhang, Z. Li, X. Liu, Y. Qiu, X. Zhao, S. Zheng, Q. Zhong, Y. Dong*, and T. Hu, "Aluminum scandium nitride on 8-inch Si wafers: Material characterization and photonic device demonstration," Optics Express, vol. 32, no. 10, pp. 17525-17525, 2024.
[10] X. Liu, R. Ma, J. Liu, S. Zheng, Q. Zhong, Y. Dong*, and T. Hu, "Metasurface-assisted amorphous germanium-tin waveguide bolometer for mid-infrared photodetection," Optics Express, vol. 32, no. 3, pp. 3501-3501, 2024.
[11] T. Huang, R. Ma, Y. Liu, T. Xu, Y. Qiu, X. Zhao, S. Zheng, Q. Zhong, Y. Dong*, and T. Hu, "Mid-infrared barium titanate electro-optic modulators based on germanium-on-silicon platform," Applied Optics, vol. 63, no. 19, pp. 5208-5208, 2024.
[12] X. Liu, J. Liu, F. He, R. Ma, X. Zhao, Q. Zhong, Y. Dong*, and T. Hu, "Cryogenic Ge-on-Si avalanche photodiodes operating at 1550 nm wavelength," in Optical Fiber Communication Conference & Exposition and the National Fiber Optic Engineers Conference (OFC), San Diego, CA, USA, Mar. 24-28, 2024.
[13] H. Wang, Y. Xu, Z. Li, L. Jia, S. Zhu, Y. Wang, Z. Yao, S. Zheng, Q. Zhong, Y. Dong*, and T. Hu, "Thin-film lithium niobate photonic devices on 8-inch silicon substrates," in Optical Fiber Communication Conference & Exposition and the National Fiber Optic Engineers Conference (OFC), San Diego, CA, USA, Mar. 5-9, 2023.
